Qnity Electronics announced the introduction of the Eon EUV photoresist product family, expanding its offerings for extreme ultraviolet (EUV) lithography.
Randal King, Chief Technology and Sustainability Officer at Qnity, stated: “EUV lithography has become the foundation for enabling next-generation logic and memory scaling, and the material requirements only intensify as geometries shrink. By introducing Eon EUV photoresists into our integrated EUV materials lineup, we’re strengthening Qnity’s ability to help customers overcome the increasing complexities of EUV patterning while continuing to drive semiconductor innovation at advanced nodes.”
The Eon EUV photoresist line is designed for advanced logic and memory devices. It provides performance in linewidth roughness and critical dimension uniformity for consistent feature profiles. The photoresists offer a broad process window that maintains performance under exposure variations. They include stochastic defect control with reduced post-etch and blob-type defectivity, as well as etch resistance for feature integrity during pattern transfer.
The announcement builds on Qnity’s existing EUV materials, which include AR EUV underlayer materials and EUVSolv EUV cleans. AR EUV underlayer materials work with EUV photoresists to broaden the process window, stabilize exposure conditions, and improve pattern fidelity. The formulations increase EUV photon absorption and acid generation efficiency in the resist, addressing pattern collapse and missing hole defects at advanced dimensions.
EUVSolv EUV cleans are mask cleaning solutions that remove tin and metal particles while protecting mask layers, including antireflective coatings and protective capping layers. With the Eon addition, Qnity provides a range of EUV materials for lithography across wavelengths.
Qnity will present its lithography materials at SEMICON Korea (Qnity Lounge, Feb. 11-13, Seoul, Korea) and at the SPIE Advanced Lithography + Patterning Conference (booth #703 and technical presentations, Feb. 22-26, San Jose, Calif.).
