Siemens announced the acquisition of Canopus AI, a company specializing in computational and AI-driven metrology solutions for semiconductor wafer and mask inspection.
The transaction closed on January 12, 2026. Canopus AI, founded in 2021 and headquartered in Grenoble, France, develops AI-powered technologies focused on metrology and inspection workflows.
Canopus AI’s solutions measure edge placement error (EPE) to improve wafer manufacturing simulation models. The company has developed an approach called “Metrospection,” which uses AI to bridge conventional wafer metrology and inspection processes. This framework supports the precision demands of advanced technology nodes.
The acquisition adds computational metrology and inspection capabilities to Siemens’ electronic design automation (EDA) portfolio, particularly complementing the Calibre platform’s computational lithography and manufacturing physics simulation tools. The combined offering aims to enhance the accuracy of printed wafer patterns, accelerate yield ramp, and reduce time-to-volume for advanced process nodes.
Siemens stated that the integration advances its semiconductor manufacturing digital twin concept, targeting sub-nanometer process control and mask development.
Tony Hemmelgarn, president and CEO of Siemens Digital Industry Software, said the acquisition aligns with Siemens’ strategy of applying industrial AI to address key challenges in semiconductor manufacturing. He noted that combining Canopus AI’s metrology and inspection technologies with Siemens’ existing capabilities creates an end-to-end EDA digital thread.
Joël Alanis, CEO of Canopus AI, stated that joining Siemens will allow the company to deliver AI-enabled metrology solutions to a wider audience within Siemens’ EDA user community. He added that the combined efforts will support semiconductor design and manufacturing teams facing the demands of the evolving industry.
Canopus AI provides a web-based viewer with Mapbox-style interface for reviewing critical dimension scanning electron microscope (CD-SEM) images, high-volume manufacturing (HVM) Oasis data, and metrology/inspection results.
Siemens Digital Industries Software operates as part of the Siemens Xcelerator business platform, offering software, hardware, and services for digital transformation across design, engineering, and manufacturing processes. The division employs approximately 70,000 people worldwide.
Siemens AG, based in Berlin and Munich, reported €78.9 billion in revenue and €10.4 billion in net income for fiscal 2025, ending September 30, 2025, with around 318,000 employees globally based on continuing operations.
