US-Made Direct-Drive V-783 Large-Aperture XY Motion Stage for Semiconductor Automation Offers 310 × 310 mm Travel and 1 nm Resolution

PI has introduced the V-783 high-precision linear motion stage. This U.S.-made direct-drive stage belongs to the V-700 series of mechanical-bearing XY stages. It offers 310 × 310 mm travel, nanometer-level resolution, and high-speed motion for precision scanning systems.

The V-700 series of mechanical-bearing XY stages is for high-precision applications that do not require the ultimate geometric performance of air bearings. The V-783 combines long travel, nanometer-level positioning performance, and smooth high-speed scanning in a compact monolithic design. It features a large 360 × 360 mm open aperture. The stage is optimized for semiconductor inspection, photonics alignment, metrology, imaging, laser micro-processing, biotechnology, microscopy, precision assembly, and advanced automation systems.

The linear-motor driven XY stage has a large aperture with more than 12 × 12 inch travel and nanometer resolution. It is designed and manufactured in the USA.

The precision positioning system offers 310 × 310 mm (12.2 × 12.2 in) travel in a rigid monolithic XY configuration. This configuration has greater stiffness and a lower profile than conventional stacked-stage designs based on two individual axes. The large open aperture supports transmissive-light applications. The direct-drive brushless ironless linear motors eliminate bac...