Park Systems Launches Joint Development Program with imec for Metrology in 3D Packaging and Logic Research

Park Systems announced the launch of a new joint development program (JDP) with imec. Under the JDP, Park Systems will evaluate and develop measurement solutions using its product portfolio, including atomic force microscopy (AFM), white light interferometry (WLI), imaging spectroscopic ellipsometry (ISE), and digital holographic microscopy (DHM).

imec, headquartered in Belgium, will provide samples based on next-generation 3D advanced packaging and logic roadmaps. imec’s state-of-the-art facilities serve as a global research hub for advanced semiconductor technologies. The scope of the new JDP reflects both the increasing complexity of semiconductor manufacturing and the continued expansion of Park Systems' metrology portfolio.

Dr. Sang-il Park, Founder and CEO of Park Systems, said: “Semiconductor manufacturing has entered a new era of complexity — one that places ever-greater demands on metrology. This JDP with imec deploys the full suite of our new metrology solutions to address the challenges that will define the next generation of semiconductor manufacturing.”

The signing of this JDP coincides with Park Systems inaugurating its new global headquarters in Gwacheon, South Korea.

Philippe Leray, Vice President R&D, Patterning at imec, said: “Future semiconductor architectures and materials introduce significant...