1000 wafers per hour handling semiconductor wafer scrubber from TEL

Date: 01/07/2014
Tokyo Electron Limited (TEL) to begin accepting orders for its new NS300Z semiconductor wafer scrubber in October 2014.

NS300Z can handle a throughput of up to 1,000 semiconductor wafers per hour through its eight process chambers but it offers quality, reliability and other market-proven features of TEL's NS300+ HT.

New pre and post-transfer functions prevent cross-contamination during wafer transport. Also the new scrubber's atomized Spray 2 (AS2) and brushes have been improved.

Author: Srinivasa Reddy N
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