Tokyo Electron Launches Prexa SDP Device Prober for Singulated Device Testing in HPC and AI Semiconductor Applications

Tokyo Electron announced the launch of Prexa SDP, a device prober that meets the need for testing singulated devices. Demand for computing capability is surging. Advanced semiconductors used in high-performance computing and AI applications increasingly require the latest 2.5D/3D packaging technology, which integrates multiple devices into a single chip. Improving the final yield of these products requires selecting Known Good Device from a pool of singulated, unpackaged devices. Challenges in the advanced KGD screening test include effectively absorbing heat and precisely controlling the temperature during testing. In addition to existing tests on entire wafers, high-precision testing of singulated devices will be essential.

The Prexa SDP builds on the diverse applications and reliable platform proven on TEL’s Prexa and other existing wafer probers. It features original temperature control technology for high-heat-generating devices and can be used to test singulated devices.

In addition to a GUI and well-established wafer prober technologies, such as high-precision contacts, wafer handling, and probe mark inspection, the new system features superior heat absorption capabilities for handling high-heat-generating devices, and a thermal head capable of high-precision active thermal control. These features ensure reliable transportation of devices and accur...