Collaborative robot for semiconductor fab maintenance

Lam Research announced introduction of cobot named Dextro, designed to optimize critical maintenance tasks on semiconductor wafer fabrication equipment. Now deployed in multiple advanced wafer fabs around the world, Dextro enables accurate, high-precision maintenance to minimize tool downtime and production variability. It drives significant first-time-right (FTR) results that can enhance yield.
Today's wafer fabrication equipment utilizes advanced physics, robotics and chemistry to create semiconductors at nanoscale. A typical fab has hundreds of process tools that each require regular, complex maintenance. Dextro is designed to improve the cost effectiveness of this equipment by performing critical maintenance tasks repeatability with sub-micron precision. "Dextro is an exciting leap forward in semiconductor manufacturing equipment maintenance. Built to work side-by-side with fab engineers, it executes complex maintenance tasks with precision and repeatability that are beyond human capability alone, enabling higher tool uptime and manufacturing yield," said Chris Carter, group vice president of the Customer Support Business Group at Lam Research. "It is a powerful addition to Lam's extensive portfolio of tools and services designed to help chipmakers optimize their fabs for cost and prod...