Date: 17th July 2011
8 new semiconductor equipment products
from Applied
Applied Materials, Inc has introduced eight semiconductor
manufacturing products over the last few weeks. They include:
1. Reflexion GT CMP for tungsten: For fabricating the transistor
contacts and vias in advanced DRAM, NAND and logic devices
2. Vantage Vulcan RTP: Annealing equipment for doping semiconductor
material
3. Centura DPN HD : Plasma nitridation and post-nitridation
anneal (PNA) chambers
4. Endura Versa XLR W PVD: Enables deposition of tungsten
films with the lowest-available resistivity
5. Endura HAR Cobalt PVD: Integrates Siconi pre-silicide
clean with PVD cobalt and TiN cap deposition for the direct
contact application in the DRAM periphery
6. Centura Integrated Gate Stack: For creating the critical
gate dielectric structures in 22nm logic chips
7. Producer Black Diamond 3: Nano-porous low-k film for
the 45/32nm copper/low-k interconnects and
8. Producer Nanocure 3: Designed to work with the Applied
Producer Black Diamond 3
For more details visit www.becauseinnovationmatters.com.
"We are excited to be announcing new semiconductor
technologies for manufacturing some of the most critical
and challenging structures in our customers' new chip designs,"
said Mike Splinter, chairman and chief executive officer
of Applied Materials. "These products from our Silicon
Systems Group will enable chipmakers to address the inflections
in new materials and architectures that will usher in a
new era of high performance and functionality to satisfy
the relentless demand for smarter, more connected mobile
devices."
"The drive for greater speed and power efficiency
is pushing the boundaries of scaling to find new solutions
for our customers that enable manufacturing down to the
atomic level with incredible precision and control,"
said Dr. Randhir Thakur, executive vice president and general
manager of the Silicon Systems Group at Applied Materials.
"Process complexity has increased considerably and
our multi-technology portfolio of products provides customers
with integration solutions that can lower their process
development times. Deep and early engagements with customers
and R&D centers worldwide have enabled us deliver differentiated
products for manufacturing advanced transistors, interconnects,
3D architectures and packaging. This is exactly where Applied's
continued innovation and experience enable us to lead and
excel."
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