Date: 9th Jun 2011
Production yield enhancing solar PV solution
from KLA-Tencor
KLA-Tencor Corporation has introduced the new solar PV
manufacturing solutions to enhance the production yield
so that production can be well controlled to prevent defects.
"Since testing FabVision Solar with the PVI-6 tool
in recent months, the speed and accuracy of our defect analysis
processes has significantly improved, contributing to overall
increased yield," said Wouter Verbist, process specialist
at Photovoltech. "We believe this product is positioned
to become a necessity for world-class solar cell manufacturers
looking to increase efficiency and improve yield by quickly
identifying and understanding defectivity root cause, enabling
effective proactive decisions that impact bottom-line results."
KLA-Tencor has used production-proven defectivity and metrology
methodologies from the semiconductor IC manufacturing process
and is designed specifically for its ICOS PVI-6 tools and
also optimized for the solar industry. The objective of
these methodologies is to replace manual analysis methods
with Automated analysis method.
"The introduction of FabVision Solar fills a void
in the PV cell manufacturing market for real-time predictive
analysis," said Jeff Donnelly, group vice president,
Growth and Emerging Markets (GEM) at KLA-Tencor. "Implementing
data collection, defectivity and line-monitoring best practices
enables our PVI-6 tool owners to take proactive measures
throughout the manufacturing process. The ability to review
in-line data at any point, not just for excursions, dramatically
shifts our customers toward predictive action."
FabVision Solar includes:
Excursion/process monitoring (statistical process control):
provides process control through in-line monitoring of all
PVI-6 measurement parameters and alarms/email notifications
on excursions
Automated report generation: increases visibility into manufacturing
process with time-based automated reporting analysis of
optical inspection measurement results from multiple inspection
modules across multiple fab manufacturing lines
Detection of repeating defects and warning capabilities:
enables quick reaction to excursions with configurable rules
set by proximity, defect type and frequency of occurrence;
and real-time alarms for email notification and on-tool
warning
Defect signature identification using multiple wafer/cell
stacking: provides means to visualize defect signatures
or frequently impacted wafer/cell locations for root cause
understanding and action in the production line
Eased problem identification through wafer/cell image review:
captures wafer/cell images and data from the PVI-6 and allows
complete review of images complemented by eased navigation
through data
FabVision Solar going to e displayed at InterSolar Europe
from June 8-10, at the New Munich Trade Fair Center in Germany.
|