New company is formed to make photoresists for EUV lithography

On one side EUV lithography equipment is being made ready for volume production, there is also the trend of developing the materials suitable for EUV. EUV requires a different photoresist material. A company named JSR Corporation is partnering with Belgium-based semiconductor technology researcher IMEC to form a joint-venture company in developing advanced materials for EUV lithography. JSR is supporting a joint-venture by upgrading its wholly-owned subsidiary in Belgium, JSR Micro NV, by installing manufacturing and analytical equipment, whereas IMEC is providing expertise and services to the joint venture for quality control on materials. The joint-venture business to manufacture JSR brand photoresists and also offer toll-manufacturing capability to other material suppliers with confidentiality secured. “JSR has been a strategic partner of imec for a long time, and I am excited with this intensified collaboration,” stated Luc Van den hove, president and CEO at imec. “This collaboration strengthens our supplier hub concept, a neutral open innovation R&D platform that involves suppliers more deeply and at an early stage of process step and module development. The partnership enabled through close proximity between the JSR manufacturing facility and the imec technology platform will allow our partners to gain access to best-in-class materials for next-generation techno...