Production yield enhancing solar PV solution from KLA-Tencor

KLA-Tencor Corporation has introduced the new solar PV manufacturing solutions to enhance the production yield so that production can be well controlled to prevent defects.

"Since testing FabVision Solar with the PVI-6 tool in recent months, the speed and accuracy of our defect analysis processes has significantly improved, contributing to overall increased yield," said Wouter Verbist, process specialist at Photovoltech. "We believe this product is positioned to become a necessity for world-class solar cell manufacturers looking to increase efficiency and improve yield by quickly identifying and understanding defectivity root cause, enabling effective proactive decisions that impact bottom-line results."

KLA-Tencor has used production-proven defectivity and metrology methodologies from the semiconductor IC manufacturing process and is designed specifically for its ICOS PVI-6 tools and also optimized for the solar industry. The objective of these methodologies is to replace manual analysis methods with Automated analysis method.

"The introduction of FabVision Solar fills a void in the PV cell manufacturing market for real-time predictive analysis," said Jeff Donnelly, group vice president, Growth and Emerging Markets (GEM) at KLA-Tencor. "Implementing data collection, defectivity and line-monitoring best practices enables our PVI-6 tool owners to take proactive measures throughout the manufacturing process. The ability to review in-line data at any point, not just for excursions, dramatically shifts our customers toward predictive action."

FabVision Solar includes:
Excursion/process monitoring (statistical process control): provides process control through in-line monitoring of all PVI-6 measurement parameters and alarms/email notifications on excursions
Automated report generation: increases visibility into manufacturing process with time-based automated reporting analysis of optical inspection measurement results from multiple inspection modules across multiple fab manufacturing lines
Detection of repeating defects and warning capabilities: enables quick reaction to excursions with configurable rules set by proximity, defect type and frequency of occurrence; and real-time alarms for email notification and on-tool warning
Defect signature identification using multiple wafer/cell stacking: provides means to visualize defect signatures or frequently impacted wafer/cell locations for root cause understanding and action in the production line
Eased problem identification through wafer/cell image review: captures wafer/cell images and data from the PVI-6 and allows complete review of images complemented by eased navigation through data

FabVision Solar going to e displayed at InterSolar Europe from June 8-10, at the New Munich Trade Fair Center in Germany.