The shrinking of transistors/MOSFETs on integrated circuit chip continued from a few 10s microns in size to 28 nm Starting from late 70s to this decade. Although now leading semiconductor factories such as Samsung, TSMC and Intel are expected to manufacture 10 nm chips in this year or next year. The benefits of shrinking is not the same after 28 nm onwards. The cost, performance, power consumption, speed not following the same curve what it has followed up to 28 nm. In future to shrinking may continue but does not provide commercial benefits like the way it has done earlier. In that sense the famous Moore's Law is less relevant or near obsolete.
In a video interview conducted by Imec chief executive Luc Van den Hove, Gordon Moore, the founder of Intel and also the one who gave the so called Moore's Law said he is impressed by how the engineers overcome the tough barriers by reaching the present nodes of 10 nm.
So get ready for some growth of monolithic 3-D chip fabrication, on chip Photonics, 450mm wafer size, and any such non-scaling but integration enhancing, performance increasing, cost reducing technologies. before some commercial breakthrough happens in the material replacing silicon.