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Date: 03-07-14

1000 wafers per hour handling semiconductor wafer scrubber from TEL

Tokyo Electron Limited (TEL) to begin accepting orders for its new NS300Z semiconductor wafer scrubber in October 2014.

NS300Z can handle a throughput of up to 1,000 semiconductor wafers per hour through its eight process chambers but it offers quality, reliability and other market-proven features of TEL's NS300+ HT.

New pre and post-transfer functions prevent cross-contamination during wafer transport. Also the new scrubber's atomized Spray 2 (AS2) and brushes have been improved.

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