Date: 2nd Sept 2010

ATMI and Ovonyx progress towards commercialization of PCM devices

ATMI and Ovonyx have announced progress toward the commercialization of Germanium Antimony Telluride (GST)-based Phase Change Memory (PCM) devices using Chemical Vapor Deposition (CVD) processes.
PCM is touted as next immediate non-volatile memory to replace NOR flash memory and also DRAM chips.

The release states, "this work enabled conformal depositions in high aspect ratio PCM cells and demonstrated good electrical results when compared to sputter-deposited GST 225 on comparable device structures. Results include various CVD alloy depositions that demonstrated set speed below 50-nanoseconds (ns), typical endurance of 108 to1010 cycles, and data retention that exceeded 100 degrees C for 10 years. Results of the latest joint research will be published as a peer-reviewed technical paper highlighting the electrical performance in the September issue of Electron Device Letters. ATMI will also be presenting a paper focusing on the CVD process at the European\Phase Change and Ovonics Symposium (E/PCOS)."

"GST-based PCM continues to show significant commercial potential as a replacement memory technology for NOR Flash and segments of DRAM markets," commented Tod Higinbotham, ATMI's executive vice-president and general manager, microelectronics. "However, one of the challenges in the path to more rapid scaling has been the lack of a CVD process capable of producing fully confined cells for further reset current reduction. Reduction in reset current will lead to memory devices that use less power, extending battery life and offering higher data bandwidth--important factors in today's data-centric, highly portable consumer devices."

The companies plan to license these technologies to the semiconductor industry with ATMI providing the associated precursor materials and the deposition technologies.The demonstration of CVD GST technology on full 300mm wafers is scheduled in the fourth quarter of 2010.

"With this achievement, we are realizing a more optimized thermal environment for the phase change volume. The end result is a cost effective, highly scalable device with reduced programming current," added Tyler Lowrey, Ovonyx President and CEO.

ATMI has been working with Ovonyx as a joint development partner since March 2008.