SEMI publishes new standards related to semiconductor manufacturing equipment

SEMI has published nine new technical standards applicable to the semiconductor, MEMS, FPD and photovoltaic (PV) manufacturing industry. The new standards, developed by technical experts from equipment and materials suppliers, device manufacturers and other companies participating in the SEMI International Standards Program, are available through the SEMIViews Standards product, available at: www.semi.org/semiviews.

Including these new standards SEMI has published 780 standards in past 36 years.

The new standards include a test method for specifying high-purity water (HPW) for photovoltaic manufacturing. This standard can also help to define operational specifications for the plant and an excursion management program. This said to be the first and only known standard for HPW in the photovoltaic area.

"The photovoltaic industry has had nowhere to go for industry-wide high-purity water specifications until now," said James Amano, Director, SEMI International Standards. "This is the third PV standard SEMI has released in the last year, and it will contribute to improved yield and ensure compatibility of equipment and processes worldwide."

The list of new SEMI Standards being released includes:

SEMI D55 - Guide for Evaluation Method of Color Performance for Color Filter Assemblies (Evaluation Method of Color Purity)

SEMI D56 - Measurement Method for Ambient Contrast of Liquid Crystal Displays

SEMI D57 - Definition Measurement Index (VCT) for Mura in FPD Image Quality Inspection

SEMI D58 - Terminology and Test Pattern for the Color Breakup of Field Sequential Color Display

SEMI E154 - Mechanical Interface Specification for 450 mm Load Port

SEMI E155 - Specification for Sensor Actuator Network for Motionnet® Communication

SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications

SEMI PV3 - Guide for High Purity Water Used in Photovoltaic Cell Processing

SEMI S27 - Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports

In addition to the nine new standards, a complete rewrite of SEMI S7 was released. This is a qualification for the safety evaluation of semiconductor processing equipment which generally occurs before it arrives at the customer site.