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Date: 26-10-16

Power semiconductor tester support GaN and SiC devics

Keithley business of Tektronix has announced the Keithley S540 Power Semiconductor Test System to perform wafer-level testing of power semiconductor devices. This new Test System is a fully-automated, 48 pin parametric test system to test power semiconductor devices and structures up to 3kV. The new test system supports testing of compound semiconductor based power semiconductor devices such as silicon carbide (SiC) and gallium nitride (GaN) power semiconductor devices. Since silicon carbide (SiC) and gallium nitride (GaN) are the latest power semiconductor devices which are doing well in the market but since they are new, thorough testing makes a requirement. This tool supports such requirements to achieve yields and production process. The S540 can do parametric measurement up to 48 pins without changing cables or probe card infrastructure. Other tests it can perform includes transistor capacitance measurements such as Ciss, Coss, and Crss up to 3kV without manual reconfiguration of test pins. S540 offers sub-pA measurement performance and can perform fully automated, high voltage leakage current tests in <1Sec. The Keithley S540 is available from March, 2017, according to the sources.

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